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MPI TS300 | 300 mm Manual Probe System For accurate and reliable DC/CV and RF measurements

Universal Use

  • Designed for wide variety of applications such as Device Characterization and Modeling, Wafer Level Reliability, Failure Analysis, IC Engineering and MEMS

Ergonomic Design

  • Unique puck controlled air bearing stage for quick single-handed operation
  • Rigid platen accommodates up to 10 DC or 4 RF positioners
  • Highly repeatable platen lift design with three discrete positions for contact, separation, and loading

Microscope Mount and Movement

  • Stable bridge for high quality optics
  • Linear Z lift for easy reconfiguration
  • 25 x 25 mm air bearing or 150 x 150 mm linear XY movement

Probe Platen

  • Stable and rigid design
  • Supports DC/CV and RF measurements
  • Rectangular adjustments for RF positioners
  • Designed for maximum thermal stability

Unique Platen Lift

  • Three discrete positions for contact, separation (300 µm) and safety loading 3 mm
  • “Auto Contact“ position with ±1 µm repeatability for consistent contact quality
  • Safety lock function at loading position

Adjustable Platen Height

  • Micrometer control for precise adjustment
  • 20 mm range for various applications
  • Including platen heigth reference scale

RF Calibration

  • 2 auxiliary chucks for calibration substrates
  • Built-in ceramic for accurate calibration
  • 1 µm flatness for consistent contact quality

Small Footprint

  • Designed for bench top use
  • Comes with vibration absorber base
  • Low profile design for maximum usability

Microscope and Optics Options

  • Various optics options available
  • Stereo MPI ST45 or single tube MPI SZ10, MZ12 with up to 12x zoom and 95 mm working distance
  • High Power microscopes FS70/PSM-1000
  • HDMI cameras, monitor user interface without computer

Thermal Chuck Integration

  • Seamless integration of the thermal controller touch screen panel provides most convenient operation

Modular Chucks

  • Various non-thermal or thermal chucks
  • Choice of triaxial or coaxial connection
  • Wide range of temperature up to 300 °C
  • Field upgradable for reduced cost of ownership
  • Easy switch between center and small wafer size control

DC and RF Positioners

  • Supports up to 4 RF and 10 DC positioners
  • Wide range of positioners available
  • Dedicated probe arms for DC/CV and RF measurements 

Chuck XY Stage Movement

  • Unique puck controlled air bearing stage for quick single-handed operation
  • 330 x 420 mm XY total stage movement
  • 25 x 25 mm XY fine micrometer adjustment
  • Resolution < 1.0 µm (0.04 mils) @ 500 µm/rev
  • Extra wide Y-range for easy loading
  • ±5° Theta fine adjustment

Front Mounted Vacuum Control

  • Easy access
  • Clearly marked

***Available Options***

  • Vibration isolation platform
  • Vacuum pump and air compressor unit
  • Probe card holder
  • Table with integrated rack for thermal controller, computer and keyboard push tray (Dual monitor stand option & Instrument shelf option

Upgradability

  • Available with various chuck options and wide range of accessories such as DC/RF/ mmW MicroPositioners, Optics, microscopes and EMI shielded dark box to support various application requirements
Features
  • 25 x 25 mm air bearing or 150 x 150 mm linear XY movement
  • Supports DC/CV and RF measurements
  • Three discrete positions for contact, separation (300 µm) and safety loading 3 mm
  • Stereo MPI ST45 or single tube MPI SZ10, MZ12 with up to 12x zoom and 95 mm working distance
  • 330 x 420 mm XY total stage movement and 25 x 25 mm XY fine micrometer adjustment
  • Resolution < 1.0 µm (0.04 mils) @ 500 µm/rev
Brand MPI Corporation

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