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MPI TS150-HP manual probe system

MPI TS150-HP | 150 mm High Power Manual Probe System For accurate High Power measurements up to 10 kV, 600 A

Universal Use

  • Designed specifically for high power device measurement and wide variety of applications such as Device Characterization and Modeling, Wafer Level Reliability, Failure Analysis, IC Engineering, and MEMS

Microscope Mount and Movement

  • Stable bridge for high quality optics
  • Linear z lift for easy reconfiguration
  • 25 x 25 mm air bearing or 50 x 50 mm linear XY movement

Adjustable Platen Height

  • Micrometer control for precise adjustment
  • 20 mm range for various applications

Probe Platen

  • Stable and rigid design
  • Supports DC/CV, RF and High Power measurements
  • Rectangular adjustments for RF positioners
  • Designed for maximum thermal stability

Unique Platen Lift

  • Three discrete positions for contact, separation (300 µm) and safety loading (3 mm)
  • Safety lock function at loading position
  • “Auto Contact“ position with ±1 µm repeatability for consistent contact quality 

Platen Arc Shield

  • Designed for safe operation
  • Prevents platen high voltage arching from chuck

Front Mounted Vacuum Control

  • Easy access
  • Clearly marked

Ergonomic and Safe Design

  • Unique puck controlled air bearing stage for quick single-handed operation
  • Rigid platen accommodates up to 10 high voltage or 4 high current positioners
  • EMI shielded DarkBox and platen ArcShieldTM for safe high voltage applications
  • Highly repeatable platen lift design with three discrete positions for contact, separation, and loading

***Available Options***

  •  Vibration isolation platform
  • Vacuum pump and air compressor unit

Upgradability

  • Available with various instrument connection options and chuck options and wide range of accessories such as MicroPositioners and microscopes to support various application requirements
Features
  • 25 x 25 mm air bearing or 50 x 50 mm linear XY movement
  • Supports DC/CV, RF and High Power measurements
  • Three discrete positions for contact, separation (300 µm) and safety loading (3 mm)
  • Stereo MPI ST45 or single tube MPI SZ10, MZ12 with up to 12x zoom and 95 mm working distance
  • Supports up to 4 high current and 8 high voltage positioners
  • Dedicated Coax and Triax high voltage and high current probe arms (up to 400 A pulse)
  • Wide range of temperature up to 300°C
  • 180 x 230 mm XY total stage movement
  • Resolution < 1.0 µm (0.04 mils) @ 500 µm/rev
Brand MPI Corporation

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