MPI TS3000 Series | 300 mm Automated Probe Systems The Dedicated Systems for Product Engineering with IceFreeEnvironment

The TS3000 from MPI is an automated 300 mm probe system, specifically designed for Product Engineering, Failure AnalysisDesign ValidationWafer Level Reliabilityand RF & mmW applications.

The TS3000 feature set provides:

  • Maximum on temperature range -60…300°C
  • Maximum on flexibility
  • Minimum cable distance to functional testers with a design specific cable interface for better measurement directivity
  • Minimum platen-to-chuck height for optimal mmW & internal node probing
  • Minimum system footprint which integrates the thermal system’s chiller “inside”

   TS3000 Fact Sheet                                                         TS3000 Data Sheet

Designed for Variety of On-Wafer Applications

  • DC-IV / DC-CV / Pulsed-IV applications
  • RF, mmW, load-pull applications & 4-port setup
  • IC Design Validation, Failure Analysis in wide temperature range from -60 to 300 °C
  • Wafer Level Reliability

Extended Flexibility

  • MPI IceFreeEnvironment™ for using MicroPositioners and probe cards simultaneously, even at negative temperature
  • Programmable microscope movements for more automation and ease of use
  • The shortest cable interface to IC tester
  • Minimize the platen-to-chuck distance for mmW & probing with active probes
  • Supports film-frame probing

Ergonomic Design and Footprint

  • Easy wafer or single DUT loading from the front
  • Integrated active vibration isolation
  • Completely integrated prober control for faster, safer and convenient system and test operation
  • The Safety Test Management (STM™) with automated dew point control
  • Reduced footprint due to smart chiller space arrangement
  • Instrument shelf option for shorter cables and higher measurement dynamic
  • Stable microscope bridge mount with 50 x 50 x 140 mm programmable movement
  • Wide range of triaxial or coaxial thermal chucks in temperature range from -60°C up to 300 °C
  • Incorporates a high performance vibration isolation platform
  • Supports up to 4 RF and 10 DC MicroPositioner
  • Thermal chuck can be operated by using the fully integrated touchscreen display
  • Provide faster, safer and convenient system control and test operation
Brand MPI Corporation

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